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Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor deposition

โœ Scribed by J. Narayan; P. Tiwari; X. Chen; J. Singh; R. Chowdhury; T. Zheleva


Book ID
121660141
Publisher
American Institute of Physics
Year
1992
Tongue
English
Weight
629 KB
Volume
61
Category
Article
ISSN
0003-6951

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