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Epitaxial growth of AlN on single-crystal Ni(111) substrates

โœ Scribed by Kim, Tae-Won; Matsuki, N.; Ohta, J.; Fujioka, H.


Book ID
121491006
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
300 KB
Volume
88
Category
Article
ISSN
0003-6951

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๐Ÿ“œ SIMILAR VOLUMES


Epitaxial growth of AlN films on single-
โœ S. Hirata; K. Okamoto; S. Inoue; T-W. Kim; J. Ohta; H. Fujioka; M. Oshima ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 587 KB

We have demonstrated the first epitaxial growth of AlN films on single-crystalline Ta substrates by the use of a low-temperature growth technique based on pulsed laser deposition (PLD). Although previous AlN films grown on Ta( 100) and ( 111) substrates have exhibited quite poor crystallinity, an ep