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Epitaxial growth of AlN on single crystal Mo substrates

✍ Scribed by Koichiro Okamoto; Shigeru Inoue; Takayuki Nakano; Tae-Won Kim; Masaharu Oshima; Hiroshi Fujioka

Book ID
108289909
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
448 KB
Volume
516
Category
Article
ISSN
0040-6090

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πŸ“œ SIMILAR VOLUMES

Epitaxial growth of AlN films on single-
Epitaxial growth of AlN films on single-crystalline Ta substrates
✍ S. Hirata; K. Okamoto; S. Inoue; T-W. Kim; J. Ohta; H. Fujioka; M. Oshima πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 587 KB

We have demonstrated the first epitaxial growth of AlN films on single-crystalline Ta substrates by the use of a low-temperature growth technique based on pulsed laser deposition (PLD). Although previous AlN films grown on Ta( 100) and ( 111) substrates have exhibited quite poor crystallinity, an ep

Characteristics of single-crystal AlN fi
Characteristics of single-crystal AlN films grown on ferromagnetic metal substrates
✍ Okamoto, K. ;Inoue, S. ;Matsuki, N. ;Kim, T.-W. ;Fujioka, H. ;Oshima, M. πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 138 KB

## Abstract We have demonstrated the first single‐crystal growth of AlN films on Fe substrates using pulsed laser deposition and in‐vestigated their structural properties. Stepped and terraced surfaces of the Fe(110) substrates have been achieved by UHV annealing. Although a low quality AlN film, w