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Sublimation growth of c -plane AlN single crystals on SiC substrates

✍ Scribed by R. R. Sumathi; P. Gille

Book ID
112069570
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
325 KB
Volume
47
Category
Article
ISSN
0232-1300

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MBE growth of cubic AlN on 3C-SiC substr
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✍ Schupp, Thorsten ;Rossbach, Georg ;Schley, Pascal ;Goldhahn, RΓΌdiger ;RΓΆppischer πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 312 KB

## Abstract We present our recent results on the growth of cubic AlN (001) layers by plasma assisted molecular beam epitaxy (PAMBE) using freestanding 3C‐SiC (001) substrate. For high‐quality c‐AlN layers reflection high‐electron energy diffraction (RHEED) patterns in all azimuths show RHEED patter