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Enhancing the sensitivity of a mass-based piezoresistive micro-electro-mechanical systems cantilever sensor

✍ Scribed by Firdaus, S.M.; Azid, I.A.; Sidek, O.; Ibrahim, K.; Hussien, M.

Book ID: 114461349
Publisher: The Institution of Engineering and Technology
Year: 2010
Tongue: English
Weight: 547 KB
Volume: 5
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2009.0105

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