✦ LIBER ✦

Enhancement of the deposition rate of a-Si:H by introduction of an electronegative molecule into a silane discharge

✍ Scribed by Toru Ikeda; Ian S. Osborne; Nobuhiro Hata; Akihisa Matsuda

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion and radical reactions in the silane

✍ G. Turban; Y. Catherine; B. Grolleau 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 844 KB

Raman study of a-Si:H films deposited by

✍ N.M. Liao; W. Li; Y.D. Jiang; Y.J. Kuang; K.C. Qi; Z.M. Wu; S.B. Li 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 233 KB

The application of low-frequency glow di

✍ Boris G Budaguan; Alexander A. Popov; Andrei Yu Sazonov; Mikhail N Bosyakov; Dmi 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 132 KB

A study of the silane glow discharge dep

✍ G. Turban; Y. Catherine; B. Grolleau 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 730 KB

Mass-transfer analysis of a:Si:H deposit

✍ Inan Chen; Frank Jansen 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 185 KB

Influence on the transport properties of

✍ J.P. Kleider; C. Longeaud; P. Roca i Cabarrocas 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 310 KB