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Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment

✍ Scribed by E. Louis; H.-J. Voorma; N.B. Koster; L. Shmaenok; F. Bijkerk; R. Schlatmann; J. Verhoeven; Yu.Ya. Platonov; G.E. van Dorssen; H.A. Padmore

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 350 KB
Volume: 23
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90140-6

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