Enhancement of near-field phase-shifting contact lithography by immersion technique

✍ Scribed by Katherine E. Weaver; Fei Wang; Akhlesh Lakhtakia

• Book ID: 108145426
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 324 KB
• Volume: 117
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1016/j.ijleo.2005.08.007