✦ LIBER ✦
Nano-image profiles transferred by near field phase-shifting lithography precisely simulated by finite element method and fabricated
✍ Scribed by Fu-Der Lai
- Book ID
- 116244395
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 812 KB
- Volume
- 258
- Category
- Article
- ISSN
- 0169-4332
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