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Enhanced electrical and dielectric properties of polymer covered silicon nanowire arrays

โœ Scribed by Rasool, Kamran; Rafiq, M. A.; Li, C. B.; Krali, E.; Durrani, Z. A. K.; Hasan, M. M.

Book ID
120396665
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
914 KB
Volume
101
Category
Article
ISSN
0003-6951

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## Abstract Ultra thin (8 nm) silicon nanowires have been fabricated by Atomic Force Microscopy (AFM) lithography on an insulator layer starting from Silicon On Insulator (SOI) substrates. Electrical measurements reveal a high sensitivity of the electron transport in these ultra thin wires to the c