Enhanced Doping Efficiency of Al-Doped ZnO by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide as an Alternative Aluminum Precursor

✍ Scribed by Wu, Y.; Potts, S. E.; Hermkens, P. M.; Knoops, H. C. M.; Roozeboom, F.; Kessels, W. M. M.

• Book ID: 121382039
• Publisher: American Chemical Society
• Year: 2013
• Tongue: English
• Weight: 676 KB
• Volume: 25
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm402974j