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Energy spectra of reflected and sputtered particles in magnetron deposition systems

✍ Scribed by JC Moreno-Marín; I Abril; A Gras-Marti; V Konoplev; JJ Jiménez-Rodriguez; AMC Pérez-Martin


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
289 KB
Volume
45
Category
Article
ISSN
0042-207X

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