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Energy-loss image formation in scanning transmission ion microscopy

✍ Scribed by J.C. Overley; R.M.S. Schofield; J.D. Macdonald; H.W. Lefevre

Book ID
113278840
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
563 KB
Volume
30
Category
Article
ISSN
0168-583X

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The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolu