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Energy distributions of neutral atoms sputtered by very low energy heavy ions

✍ Scribed by Robert A. Brizzolara; C.Burleigh Cooper; Thomas K. Olson


Book ID
113278904
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
787 KB
Volume
35
Category
Article
ISSN
0168-583X

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>