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Energy deposition by soft x-rays - an application to lithography for VLSI

✍ Scribed by Burke, E. A.; Garth, J. C.

Book ID: 114661773
Publisher: IEEE
Year: 1979
Tongue: English
Weight: 984 KB
Volume: 26
Category: Article
ISSN: 0018-9499
DOI: 10.1109/tns.1979.4330242

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