✦ LIBER ✦

Energy deposition and substrate heating during magnetron sputtering

✍ Scribed by M Andritschky; F Guimarães; V Teixeira

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Analysis of substrate heat fluxes encoun

✍ R. Hieronymi; B. Sirovich; W. Class 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 298 KB

Substrate heating in cylindrical magnetr

✍ John A Thornton 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 466 KB

Substrate heating rates for planar and c

✍ John A. Thornton; James L. Lamb 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 601 KB

Energy spectra of reflected and sputtere

✍ JC Moreno-Marín; I Abril; A Gras-Marti; V Konoplev; JJ Jiménez-Rodriguez; AMC Pé 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 289 KB

Oxygen incorporation in Al thin films du

✍ DN Popov; TzK Kotlarova; TzD Uzunov; VN Gaydarova 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 362 KB

Magnetron sputter deposition of boron an

✍ Mark A. McKernan 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 563 KB