Analysis of substrate heat fluxes encountered during aluminum magnetron sputter deposition

✍ Scribed by R. Hieronymi; B. Sirovich; W. Class

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 298 KB
• Volume: 96
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(82)90248-6