Endogenous and exogenous hydrogen influence on amorphous silicon thin films analysis by pulsed radiofrequency glow discharge optical emission spectrometry

✍ Scribed by Pascal Sánchez; Deborah Alberts; Beatriz Fernández; Armando Menéndez; Rosario Pereiro; Alfredo Sanz-Medel

• Book ID: 116179313
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 590 KB
• Volume: 714
• Category: Article
• ISSN: 0003-2670
• DOI: 10.1016/j.aca.2011.11.052