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Emission spectroscopy study of N 2 -H 2 glow discharge for metal surface nitriding

✍ Scribed by Petitjean, L; Ricard, A


Book ID
120481417
Publisher
Institute of Physics
Year
1984
Tongue
English
Weight
583 KB
Volume
17
Category
Article
ISSN
0022-3727

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Optical emission spectroscopy (OES) is a non-intrusive diagnostic technique, widely used to study different kinds of plasmas. In the present work, a locally resolved OES technique was used to obtain near cathode (substrate) emission spectra for N 2 -H 2 glow discharges. It was observed that, along w