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Temperature measurement of an N2 glow discharge by emission spectroscopy

✍ Scribed by A. Plain; A. Ricard

Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
227 KB
Volume
95
Category
Article
ISSN
0375-9601

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Optical emission spectroscopy (OES) is a non-intrusive diagnostic technique, widely used to study different kinds of plasmas. In the present work, a locally resolved OES technique was used to obtain near cathode (substrate) emission spectra for N 2 -H 2 glow discharges. It was observed that, along w