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Emission spectroscopy of reactive low-voltage ion plating for metal-oxide thin films

✍ Scribed by Zarrabian, S. ;Lee, C. ;Guenther, K. H.

Book ID: 115343014
Publisher: The Optical Society
Year: 1993
Tongue: English
Weight: 821 KB
Volume: 32
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.32.005606

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