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Ellipsometry of anisotropic surfaces

✍ Scribed by De Smet, D. J.

Book ID
115383328
Publisher
Optical Society of America
Year
1973
Weight
823 KB
Volume
63
Category
Article
ISSN
0030-3941

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## Abstract In this paper, three methods of immersion ellipsometry based on measuring the ellipsometric parameters in air and non‐absorbing liquids are used for analysing silicon, germanium and gallium arsenide single crystals covered with very thin native oxide layers under normal laboratory condi