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Generalized ellipsometry of anisotropic media

✍ Scribed by V. S. Merkulov

Book ID
110175523
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
164 KB
Volume
103
Category
Article
ISSN
0030-400X

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## Abstract A procedure for the measurement of the generalized ellipsometric angles using a phase‐modulation spectroscopic ellipsometer is described. Generalized phase‐modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy includ