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Ellipsometric analysis of ultrathin oxide layers on SIMOX wafers

โœ Scribed by T Motooka; Y Kusano; K Nisihira; N Kato


Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
180 KB
Volume
159-160
Category
Article
ISSN
0169-4332

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โœ J.M. Eldridge; Y.J. Van der Meulen; D.W. Dong ๐Ÿ“‚ Article ๐Ÿ“… 1972 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 194 KB