✦ LIBER ✦

Electrostatically deflectable polysilicon torsional mirrors

✍ Scribed by M. Fischer; H. Graef; W. von Münch

Book ID: 108028233
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 684 KB
Volume: 44
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)00785-3

No coin nor oath required. For personal study only.

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