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[IEEE 2009 10th International Conferene on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Delft, The Netherlands (2009.04.26-2009.04.29)] EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - The dynamic model of electrostatic torsion mirror with pull-in consideration for multiphysics behavior anticipation

✍ Scribed by Yuheon Yi, ; Hiroyuki Fujita, ; Hiroshi Toshiyoshi,

Book ID: 121207010
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 713 KB
Category: Article
ISBN: 1424441609
DOI: 10.1109/ESIME.2009.4938488

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