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✦ LIBER ✦

[IEEE 2009 10th International Conferene on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Delft, The Netherlands (2009.04.26-2009.04.29)] EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements

✍ Scribed by Michael, S.; Brueckner, K.; Niebelschuetz, F.; Tonisch, K.; Schaffel, Ch.

Book ID: 126921629
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 287 KB
Category: Article
ISBN: 1424441609
DOI: 10.1109/esime.2009.4938498

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