[IEEE 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, HI, USA (18-21 Aug. 2003)] 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

[IEEE 2003 IEEE/LEOS International Confe

✍ Greywall, D.S.; Chien-Shing Pai, ; Sang-Hyun Oh, ; Chorng-Ping Chang, ; Marom, D 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 415 KB

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✍ Leclerc, E.; Debray, A.; Tiercelin, N.; Fujii, T.; Fujita, H. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 204 KB

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✍ Marom, D.M. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 447 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Degettekin, F.L.; Hall, N.A.; Lee, W. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 209 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Deppe, D.G.; Shchekin, O.B.; Mo, Q.; Chen, H.; Huang, Z. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 219 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Kyoungsik Yu, ; Daesung Lee, ; Krishnamoorthy, U.; Solgaard, O. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 246 KB