[IEEE 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, HI, USA (18-21 Aug. 2003)] 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - Micromachined acoustic sensors with integrated optoelectronic readout

[IEEE 2003 IEEE/LEOS International Confe

✍ Greywall, D.S.; Chien-Shing Pai, ; Sang-Hyun Oh, ; Chorng-Ping Chang, ; Marom, D 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 415 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Marom, D.M. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 447 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Deppe, D.G.; Shchekin, O.B.; Mo, Q.; Chen, H.; Huang, Z. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 219 KB

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✍ Kyoungsik Yu, ; Daesung Lee, ; Krishnamoorthy, U.; Solgaard, O. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 246 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Che-Heung Kim, ; Jaehyoung Park, ; Namkyoo Park, ; Yong-Kweon Kim, 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 242 KB

[IEEE 2003 IEEE/LEOS International Confe

✍ Bhalotra, S.R.; Kung, H.L.; Knipp, D.; Stiebig, H.; Miller, D.A.B. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 195 KB