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Electrostatic force microscopy study of electrical conductivity of hydrogen-terminated CVD diamond films

✍ Scribed by Volodin, A. ;Toma, C. ;Bogdan, G. ;Deferme, W. ;Haenen, K. ;Neslàdek, M. ;Van Haesendonck, C.

Book ID
105364628
Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
340 KB
Volume
204
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Electrostatic force microscopy (EFM) has been used to probe the conducting properties of the hydrogen‐terminated (H‐terminated) surface of CVD diamond films. Two parallel electrodes, separated by a distance of 100 µm, are fabricated on the sample surface. EFM images the voltage distribution over a current‐carrying H‐terminated diamond film. The almost linear voltage drop in highly conductive H‐terminated diamond surface layers indicates that the layers behave as diffusive conductors with a well‐defined value of the sheet resistance. On the other hand, conductive as well as insulating regions are observed to coexist for H‐terminated diamond surfaces with poor electric conductivity. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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