✦ LIBER ✦

Electrophysics of micromechanical comb actuators

✍ Scribed by Johnson, W.A.; Warne, L.K.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Micromechanical comb actuators with low

✍ Jaecklin, V P; Linder, C; Rooij, N F de; Moret, J M 📂 Article 📅 1992 🏛 Institute of Physics 🌐 English ⚖ 603 KB

Optical actuation of micromechanical com

✍ Koehler, D. R. 📂 Article 📅 1997 🏛 Optical Society of America 🌐 English ⚖ 357 KB

Comb-drive actuators for large displacem

✍ Legtenberg, Rob; Groeneveld, A W; Elwenspoek, M 📂 Article 📅 1996 🏛 Institute of Physics 🌐 English ⚖ 291 KB

Extending displacements of comb drive ac

✍ Hou, Max Ti-Kuang; Huang, Gordon Kou-Wei; Huang, Jing-Yi; Liao, Ke-Min; Chen, Ro 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 688 KB

Verification of the micromechanical char

✍ M Kohl; J Göttert; J Mohr 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 681 KB

Optimization of an electromagnetic comb

✍ S. Schonhardt; J.G. Korvink; J. Mohr; U. Hollenbach; U. Wallrabe 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 796 KB