Structural and chemical analysis of C :
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E. Ech-chamikh; M. Azizan; E.L. Ameziane; A. Bennouna; M. Brunel; T.T.A. Nguyen
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Article
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1993
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Elsevier Science
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English
β 464 KB
Hydro-oxygenated carbon (C: H,O) and silicon (Si: H,O) layers are deposited by RF sputtering of graphite and silicon targets in a mixture of argon, hydrogen and oxygen gases.