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Electronic and atomic structures of Ti[sub 1âx]Al[sub x]N thin films related to their damage behavior

✍ Scribed by Tuilier, M.-H.; Pac, M.-J.; GÄ±Ìrleanu, M.; Covarel, G.; Arnold, G.; Louis, P.; Rousselot, C.; Flank, A.-M.

Book ID: 121237530
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 763 KB
Volume: 103
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2907415

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