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Deposition of SiN[sub x]:H thin films by the electron cyclotron resonance and its application to Al/SiN[sub x]:H/Si structures
✍ Scribed by Garcia, S.; Martil, I.; Gonzalez Diaz, G.; Castan, E.; DuenÌas, S.; Fernandez, M.
- Book ID
- 121012592
- Publisher
- American Institute of Physics
- Year
- 1998
- Tongue
- English
- Weight
- 428 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.366713
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