Silylated poly(4-hydroxystyrene)s as neg
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Tsutomu Shinoda; Mitsuhide Yoshikawa; Tohru Nishiwaki; Haruo Inoue
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Article
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1998
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John Wiley and Sons
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English
β 216 KB
Silylated poly(4-hydroxystyrene)s and radical polymerized 4-tert-butyldimethylsilyloxystyrene (TBDMSOSt) were examined as electron beam resists. Commercial poly(4-hydroxystyrene) (PHS) with M w Ο 1.69 Ο« 10 4 and M w /M n Ο 5.41 was silylated with 1-(trimethylsilyl)imidazole and tert-butylchlorodimet