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Electron Probe Microanalysis of Insulating Oxides: Monte Carlo Simulations

✍ Scribed by O. Jbara; B. Portron; D. Mouze; J. Cazaux

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
672 KB
Volume
26
Category
Article
ISSN
0049-8246

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✦ Synopsis

Using a model for the electric Ðeld built up in insulating materials irradiated by electrons, a Monte Carlo simulation method has been applied to the binary oxides MgO, and

The results show the Al

. alteration of the shape of the depth distribution of characteristic x-ray production, the U(qz) function, for both metal and oxygen Ka lines. The inΓ‘uence of the electric Ðeld built up on the measured x-ray intensities was clearly established. The changes in other physical quantities, such as the energy and angular distribution of backscattering electrons and energy deposition were also investigated.

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## Abstract We have carried out Monte Carlo simulation of the motion of electrons in the space charge sheath surrounding a cylindrical Langmuir (electrostatic) probe. The electron currents to the probe have been calculated from these simulations for different conditions (pressure of neutral gas, pr