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Monte Carlo Simulations of the Electron Currents Collected by Electrostatic Probes

✍ Scribed by D. Trunec; M. Holík; P. Kudrna; O. Bilyk; A. Marek; R. Hippler; M. Tichý


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
264 KB
Volume
44
Category
Article
ISSN
0005-8025

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✦ Synopsis


Abstract

We have carried out Monte Carlo simulation of the motion of electrons in the space charge sheath surrounding a cylindrical Langmuir (electrostatic) probe. The electron currents to the probe have been calculated from these simulations for different conditions (pressure of neutral gas, presence of magnetic field). The results of the simulations have been compared with recent Langmuir probe measurements made in cylindrical DC magnetron plasmas. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)


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