We have carried out Monte Carlo simulation of the motion of Ar + ions in the space charge sheath surrounding a cylindrical Langmuir probe. The ion currents to the probe have been calculated from these simulations and the percentages of ions crossing the sheath boundary that are collected by the prob
Monte Carlo Simulations of the Electron Currents Collected by Electrostatic Probes
✍ Scribed by D. Trunec; M. Holík; P. Kudrna; O. Bilyk; A. Marek; R. Hippler; M. Tichý
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 264 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0005-8025
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✦ Synopsis
Abstract
We have carried out Monte Carlo simulation of the motion of electrons in the space charge sheath surrounding a cylindrical Langmuir (electrostatic) probe. The electron currents to the probe have been calculated from these simulations for different conditions (pressure of neutral gas, presence of magnetic field). The results of the simulations have been compared with recent Langmuir probe measurements made in cylindrical DC magnetron plasmas. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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