## Abstract We have developed a technique for preparation of crossβsectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and N
β¦ LIBER β¦
Electron microscopy of multilayer thin films
β Scribed by J.M. Pearson
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 756 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0040-6090
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