Electron energy spread in high-voltage variable shape E-beam lithography systems

✍ Scribed by T.S. Norris; G.A.C. Jones; H. Ahmed

• Book ID: 107920341
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 298 KB
• Volume: 6
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(87)90022-0