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Electron energy loss fine structure measurements of silicon nitride films

✍ Scribed by J. Tsukajima; K. Arai; S. Takatoh; T. Enokijima; T. Hayashi; T. Yikegaki; A. Kashiwagi; K. Tokunaga; T. Suzuki; T. Fujikawa; S. Usami

Book ID: 113205320
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 355 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08637-3

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