Electron-Beam Technology in Microelectronic Fabrication

✍ Scribed by George Brewer (Eds.)

Publisher: Elsevier Science
Year: 1980
Tongue: English
Leaves: 367
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Content:
CONTRIBUTORS, Page ii
Front Matter, Page iii
Copyright, Page iv
List of Contributors, Page vii
Preface, Pages ix-xi
1 - High resolution lithography, Pages 1-58, GEORGE R. BREWER
2 - Electron-beam processes, Pages 59-140, JAMES S. GREENEICH
3 - Electron-beam lithography machines, Pages 141-216, DONALD R. HERRIOTT, GEORGE R. BREWER
4 - Device fabrication by electron-beam lithography, Pages 217-257, RICHARD C. HENDERSON
5 - Mask fabrication by electron-beam lithography, Pages 259-307, J.P. BALLANTYNE
6 - Replication techniques, Pages 309-356, JACQUES TROTEL, BERNARD FAY
Index, Pages 357-362

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