Plasma Electronics Applications in Micro
โ T Makabe and Z Petrovic
๐ Library
๐ English
โฆ LIBER โฆ
๐
Plasma electronics: applications in microelectronic device fabrication
โ Scribed by T. Makabe, Z. Petrovic
- Publisher
- Taylor & Francis
- Year
- 2006
- Tongue
- English
- Leaves
- 336
- Series
- Series in Plasma Physics
- Edition
- 1
- Category
- Library
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