Electron Beam Testing Technology

✍ Scribed by William Nixon (auth.), John T. L. Thong (eds.)

• Publisher: Springer US
• Year: 1993
• Tongue: English
• Leaves: 467
• Series: Microdevices
• Edition: 1
• Category: Library

✦ Synopsis

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

✦ Table of Contents

Front Matter....Pages i-xvi
Background to Electron Beam Testing Technology....Pages 1-9
Front Matter....Pages 11-11
Introduction....Pages 13-34
Principles and Applications....Pages 35-125
Front Matter....Pages 127-127
Essential Electron Optics....Pages 129-173
Electron Beam Interaction with Specimen....Pages 175-209
Electron Spectrometers and Voltage Measurements....Pages 211-239
High-Speed Techniques....Pages 241-287
Picosecond Photoemission Probing....Pages 289-313
Signal and Image Processing....Pages 315-358
Front Matter....Pages 359-359
System Integration....Pages 361-395
Practical Considerations in Electron Beam Testing....Pages 397-415
Industrial Case Studies....Pages 417-444
Back Matter....Pages 445-462

✦ Subjects

Solid State Physics;Spectroscopy and Microscopy;Condensed Matter Physics;Crystallography;Electrical Engineering;Optical and Electronic Materials