✦ LIBER ✦

Electron-beam lithography using vector-scan techniques

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The Outline Procedure in Pattern Data Pr

✍ Komatsu, K.; Suzuki, M. 📂 Article 📅 1987 🏛 IEEE 🌐 English ⚖ 809 KB

Improvements to the alignment process in

✍ K.E. Docherty; S. Thoms; P. Dobson; J.M.R. Weaver 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 146 KB

Application of moiré techniques in scann

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 148 KB

Nanometer structure fabrication using el

✍ M. Isaacson; A. Muray; M. Scheinfein; I. Adesida; E. Kratschmer 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 479 KB

Optimum switching time for a beam-size s

✍ E. Koets; P. Kruit; T. Chisholm 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 431 KB

Low-cost electron-beam lithography packa

✍ McIntyre, Brian L. ;Dennis, Christopher L. 📂 Article 📅 1988 🏛 The Optical Society 🌐 English ⚖ 362 KB