Improvements to the alignment process in a commercial vector scan electron beam lithography tool

✍ Scribed by K.E. Docherty; S. Thoms; P. Dobson; J.M.R. Weaver

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 146 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.01.081