✦ LIBER ✦
Optimum switching time for a beam-size switch (250 nm ⇔ 1000 nm) in a vector scan electron beam lithography machine
✍ Scribed by E. Koets; P. Kruit; T. Chisholm
- Book ID
- 103599265
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 431 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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