Electron beam lithography for fabrication of 0.1μm scale structures in thick single level resist

✍ Scribed by M. Gentili; L. Grella; L. Luciani; L. Mastrogiacomo; L. Scopa

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 698 KB
• Volume: 14
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(91)90002-u