✦ LIBER ✦
A comparison of electron sensitive single, Bi-, and tri-level resist schemes for the fabrication of sub-micron gate structures in doped polysilicon
✍ Scribed by H. Willis; A.G. Brown; S.J. Till; S.H. Mortimer
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 464 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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