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Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings

✍ Scribed by Schmiedeskamp, Bernt

Book ID: 121342041
Publisher: The International Society for Optical Engineering
Year: 1994
Tongue: English
Weight: 477 KB
Volume: 33
Category: Article
ISSN: 0091-3286
DOI: 10.1117/12.163207

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