Characterization of r.f. sputtered thin Mo, W and Si films as precursors to multilayer X-ray mirrors

✍ Scribed by D. Bhattacharyya; D. Joseph; A.K. Poswal

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 348 KB
• Volume: 248
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.03.195